METHOD OF CRYSTALLIZING A PATTERN AND APPARATUS FOR PERFORMING THE SAME

• Main Author: CHOI, HEE DOK
• Format: Patent
• Language: English; Korean
• Published: 06.03.2015
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on substrates, thereby plasticizing the pattern. According to the present invention, the crystallizing method is allowed to crystallize the pattern while testing the same, thereby significantly reducing time of crystallizing and testing the pattern.