METHOD OF CRYSTALLIZING A PATTERN AND APPARATUS FOR PERFORMING THE SAME

In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on...

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Main Author CHOI, HEE DOK
Format Patent
LanguageEnglish
Korean
Published 06.03.2015
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Abstract In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on substrates, thereby plasticizing the pattern. According to the present invention, the crystallizing method is allowed to crystallize the pattern while testing the same, thereby significantly reducing time of crystallizing and testing the pattern.
AbstractList In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on substrates, thereby plasticizing the pattern. According to the present invention, the crystallizing method is allowed to crystallize the pattern while testing the same, thereby significantly reducing time of crystallizing and testing the pattern.
Author CHOI, HEE DOK
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Snippet In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and...
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SourceType Open Access Repository
SubjectTerms AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
Title METHOD OF CRYSTALLIZING A PATTERN AND APPARATUS FOR PERFORMING THE SAME
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