SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support a...

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Main Authors WESTERLAKEN JAN STEVEN CHRISTIAAN, OVERKAMP JIM VINCENT, VAN BEIJNUM MAARTEN, KOEVOETS ADRIANUS HENDRIK, JACOBS JOHANNES HENRICUS WILHELMUS, FIEN MENNO, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBERTUS, LAFARRE RAYMOND WILHELMUS LOUIS, HOUBEN MARTIJN, TEN KATE NICOLAAS, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Format Patent
LanguageEnglish
Korean
Published 05.03.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.
Bibliography:Application Number: KR20147036615