MICRO DEVICE TRANSFER HEAD WITH SILICON ELECTRODE

• Main Authors: GOLDA DARIUSZ, BIBL ANDREAS
• Format: Patent
• Language: English; Korean
• Published: 21.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; MICROSTRUCTURAL TECHNOLOGY; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING