LINEAR ACTUATOR AND VACUUM CONTROL DEVICE

• Main Authors: KOUKETSU MASAYUKI, ITAFUJI HIROSHI
• Format: Patent
• Language: English; Korean
• Published: 15.12.2014
• Subjects: ACTUATING-FLOATS; BASIC ELECTRIC ELEMENTS; BLASTING; COCKS; CONTROLLING; CYLINDERS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR; DEVICES FOR VENTING OR AERATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; FLUID-PRESSURE ACTUATORS; FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; HYDRAULICS OR PNEUMATICS IN GENERAL; LIGHTING; MECHANICAL ENGINEERING; PHYSICS; PISTONS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; REGULATING; SEALINGS; SEMICONDUCTOR DEVICES; SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

리니어 액추에이터(A)는, 진공 챔버(40)에 형성된 개구(49)를 두어 해당 진공 챔버(40)의 내부에 향하고, 직선방향으로 왕복이동하는 피스톤 실린더(31)와, 피스톤 실린더(31)를 왕복이동시키는 구동부(70)를 구비한다. 피스톤 실린더(31)의 외표면은, 원통형 부재(32)로 피복되어 있다. 또한, 리니어 액추에이터(A)는, 개구부(49)에 만들어져, 원통형 부재(32)를 접동시키면서 진공 챔버(40)의 내부와 해당 진공 챔버(40)의 외부와의 사이를 봉지(밀봉)하는 접동부(60)을 구비한다. 원통형 부재(32)는, 적어도 피스톤 실린더(31)에 있어서 제2의 접동범위(Lc)를 포함하는 접동범위를 피복하도록 구성된다. 또한 원통형 부재(32)의 외표면은, 피스톤 실린더(31)의 외표면보다도 단위면적당의 기체의 흡착량이 적게 구성되어 있다. A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.