YIELD MANAGEMENT SYSTEM AND METHOD FOR ROOT CAUSE ANALYSIS USING MANUFACTURING SENSOR DATA

• Main Authors: LEE, JONG HO, SHIN, KAE YOUNG, LIM, JONG SEUNG, AHN, DAE JUNG, MIN, SEUNG JAI
• Format: Patent
• Language: English; Korean
• Published: 10.12.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

Disclosed are a system and a device for analyzing product manufacturing process. According to an embodiment of the present invention, a system for analyzing a yield of a product includes a data extracting part extracting sensor data from multiple sensors included in a manufacturing facility, a reference signal generating part generating a reference signal of each of the sensors from the sensor data, and a sensor detecting part detecting at least one sensor correlated with the yield of the product by using the sensor data and the reference signal. 제품의 제조 공정 분석 시스템 및 장치가 개시된다. 본 발명의 일 실시예에 따른 제품의 수율 분석 시스템은, 제조 설비에 구비된 복수 개의 센서들로부터 센서 데이터를 추출하는 데이터 추출부, 상기 센서 데이터로부터 상기 복수 개의 센서 각각의 기준 신호(Reference Signal)를 생성하는 기준 신호 생성부, 및 상기 센서 데이터 및 상기 기준 신호를 이용하여 상기 제품의 수율과 상관관계가 존재하는 하나 이상의 센서를 검출하는 센서 검출부를 포함한다.