APPARATUS FOR SHAKING NOZZLE OF PLATING TANK AND SPRAY METHOD USING THE SAME

The present invention relates to an apparatus for shaking a nozzle of a plating tank, and a spray method using the same. More specifically, the said invention relates to an apparatus for shaking a nozzle of a plating tank which can evenly spray a plating liquid on the entire substrate, and a spray m...

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Bibliographic Details
Main Authors KIM, NAM SUNG, KIM, DONG SO
Format Patent
LanguageEnglish
Korean
Published 02.12.2014
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Summary:The present invention relates to an apparatus for shaking a nozzle of a plating tank, and a spray method using the same. More specifically, the said invention relates to an apparatus for shaking a nozzle of a plating tank which can evenly spray a plating liquid on the entire substrate, and a spray method using the same. The apparatus for shaking a nozzle of the present invention comprises: a plating tank wherein plating fluid is received; a pipe portion disposed in the internal of the plating tank to spray the plating fluid to the substrate through the nozzle; and a moving portion to move the pipe portion to the substrate, wherein the flowing portion reciprocates the nozzle in the upper and lower direction.
Bibliography:Application Number: KR20130057741