METHOD OF MANUFACTURING FOR CAPACITOR AND CAPACITOR THEREOF, AND METHOD OF MANUFACTURING FOR ORGANIC LUMINESCENCE DISPLAY

• Main Authors: YANG, HUI WON, CHOI, CHAUN GI
• Format: Patent
• Language: English; Korean
• Published: 14.11.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention relates to a method for manufacturing a capacitor, a method for manufacturing an organic light emitting display device comprising the same, and the organic light emitting display device manufactured by means of the method. According to an embodiment of the present invention, provided is a method for manufacturing a capacitor, comprising steps of: forming an oxide semiconductor pattern on a substrate; forming an insulator film on the substrate to cover the oxide semiconductor pattern; increasing the carrier concentration of an oxide semiconductor by heat treatment; and forming a first electric conductor pattern to be overlapped with the oxide semiconductor pattern on the insulator film, wherein the oxide semiconductor pattern where the carrier concentration is increased functions as a lower electrode and the first electric conductor functions as an upper electrode.