A SAPPHIRE SUBSTRATE

A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for...

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Bibliographic Details
Main Authors CHERIAN ISAAC K, RIZZUTO ROBERT A, CHINNAKARUPPAN PALANIAPPAN, TANIKELLA BRAHMANANDAM V, VEDANTHAM RAMANUJAM, SIMPSON MATTHEW A
Format Patent
LanguageEnglish
Korean
Published 13.11.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Bibliography:Application Number: KR20147029599