METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM

In a method for producing a metal oxide film according to the present invention, a solution containing zinc is sprayed onto a substrate placed under non-vacuum, and then, a dopant solution containing a dopant is sprayed onto the substrate. After that, a deposited metal oxide film is subjected to a r...

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Bibliographic Details
Main Authors ORITA HIROYUKI, SHIRAHATA TAKAHIRO, HIRAMATSU TAKAHIRO
Format Patent
LanguageEnglish
Korean
Published 06.11.2014
Subjects
CHEMISTRY
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F
INORGANIC CHEMISTRY
METALLURGY
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Summary:In a method for producing a metal oxide film according to the present invention, a solution containing zinc is sprayed onto a substrate placed under non-vacuum, and then, a dopant solution containing a dopant is sprayed onto the substrate. After that, a deposited metal oxide film is subjected to a resistance reducing treatment. A molar concentration of the dopant supplied to the substrate with respect to a molar concentration of the zinc supplied to the substrate is not less than a predetermined value.
Bibliography:Application Number: KR20147026730