DEPOSITING CHAMBER, DEPOSITING SYSTEM COMPRISING THE SAME AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY
According to the present invention, a deposition chamber includes: a chamber main body which includes an inner space therein; substrate fixating parts which are aligned in the first direction and fixate each of multiple substrates; a deposition source which is arranged to face the substrates and spr...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
05.11.2014
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Subjects | |
Online Access | Get full text |
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Summary: | According to the present invention, a deposition chamber includes: a chamber main body which includes an inner space therein; substrate fixating parts which are aligned in the first direction and fixate each of multiple substrates; a deposition source which is arranged to face the substrates and sprays a deposition material on the substrates; and a deposition source transferring part which supports the deposition source and transfers the deposition source so as to make the deposition source face one of the substrates. |
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Bibliography: | Application Number: KR20130046775 |