DEPOSITING CHAMBER, DEPOSITING SYSTEM COMPRISING THE SAME AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY

• Main Authors: PARK, SEUK HWAN, JOO, SUNG JOONG, CHA, YOU MIN
• Format: Patent
• Language: English; Korean
• Published: 05.11.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

According to the present invention, a deposition chamber includes: a chamber main body which includes an inner space therein; substrate fixating parts which are aligned in the first direction and fixate each of multiple substrates; a deposition source which is arranged to face the substrates and sprays a deposition material on the substrates; and a deposition source transferring part which supports the deposition source and transfers the deposition source so as to make the deposition source face one of the substrates.