METHOD FOR MANAGING ATMOSPHERE IN STORAGE CONTAINER

• Main Authors: OYAMA KATSUHIKO, TAKEUCHI YASUSHI, ASARI SHINJI
• Format: Patent
• Language: English; Korean
• Published: 22.10.2014
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; BASIC ELECTRIC ELEMENTS; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; STORING; TRANSPORTING

Provided is a method for managing atmosphere in a storage container capable of filling the inside of a container for a substrate such as FOUP with inert gas at a high speed. The present invention includes a container return area (S2) and a substrate return area (S1) separated by a partition (2) having a return part (20) which is opened or closed by an opening/closing door (5). Processing devices (1, 10) include; a container storage shelf (18) for arranging storage containers (C) capable of containing a plurality of substrates (W) airtight by the opening or closing of a cover and keeping the same, arranged in the container return area; and a cover opening device (6) capable of filling the inside of container with inert gas by removing the cover of a storage container attached on the edge of the entrance of a returning part, arranged at the opening/closing door. The method comprises the following steps: a step of filling the inside of storage container storing the unprocessed substrate with inert gas using the cover opening device; a step of returning the storage container in which the inside is filled with inert gas to the container storage shelf and arranging the same; and a step of arranging the storage containers on the container storage shelf.