SEMICONDUCTOR DEVICE HAVING A CONDUCTIVE PLUG

• Main Authors: HWANG, YOO SANG, KIM, DAE IK, PARK, JE MIN, SON, NAK JIN, KIM, JI YOUNG
• Format: Patent
• Language: English; Korean
• Published: 18.09.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed is a semiconductor device having a conductive plug. A semiconductor device according to the present invention includes a substrate including a connection object region, a conductive line which is separated from the substrate by an insulating layer interposed between substrate and the conductive line, and a conductive plug which electrically connects the conducive line to the connection object region. A conductive plug includes a first conductive plug which has a lower surface touching the connection object region of the substrate and the second sidewall facing the first sidewall of the conductive line, and a second conductive plug which touches the first sidewall of the conducive line and the second sidewall of a first conductive plug between the conductive line and the first conductive plug, respectively.