ROTATED STI DIODE ON FINFET TECHNOLOGY

• Main Authors: TSENG JEN CHOU, LIN WUN JIE, SONG MING HSIANG, CHANG SUN JAY, CHEN BO TING
• Format: Patent
• Language: English; Korean
• Published: 17.09.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A diode includes a plurality of first combo fins with lengthwise directions in parallel to a first direction, wherein the first combo fins include parts of a first conductivity type. The diodes further includes a plurality of second combo fins with the lengthwise directions in parallel to the first...