ROTATED STI DIODE ON FINFET TECHNOLOGY

A diode includes a plurality of first combo fins with lengthwise directions in parallel to a first direction, wherein the first combo fins include parts of a first conductivity type. The diodes further includes a plurality of second combo fins with the lengthwise directions in parallel to the first...

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Main Authors TSENG JEN CHOU, LIN WUN JIE, SONG MING HSIANG, CHANG SUN JAY, CHEN BO TING
Format Patent
LanguageEnglish
Korean
Published 17.09.2014
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Abstract A diode includes a plurality of first combo fins with lengthwise directions in parallel to a first direction, wherein the first combo fins include parts of a first conductivity type. The diodes further includes a plurality of second combo fins with the lengthwise directions in parallel to the first direction, wherein the second combo fins include parts of a second conductivity type which is opposite to the first conductivity type. An isolation region is located between the first combo fins and the second combo fins. The first and second combo fins form a cathode and an anode of the diode. The diode has a current flowing in a second direction which is perpendicular to the first direction. The current flows between the anode and the cathode.
AbstractList A diode includes a plurality of first combo fins with lengthwise directions in parallel to a first direction, wherein the first combo fins include parts of a first conductivity type. The diodes further includes a plurality of second combo fins with the lengthwise directions in parallel to the first direction, wherein the second combo fins include parts of a second conductivity type which is opposite to the first conductivity type. An isolation region is located between the first combo fins and the second combo fins. The first and second combo fins form a cathode and an anode of the diode. The diode has a current flowing in a second direction which is perpendicular to the first direction. The current flows between the anode and the cathode.
Author CHEN BO TING
TSENG JEN CHOU
CHANG SUN JAY
SONG MING HSIANG
LIN WUN JIE
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Snippet A diode includes a plurality of first combo fins with lengthwise directions in parallel to a first direction, wherein the first combo fins include parts of a...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title ROTATED STI DIODE ON FINFET TECHNOLOGY
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