METHOD OF FORMING STRUCTURAL BODY HAVING PHASE SEPARATION STRUCTURE AND STRUCTURAL BODY HAVING PHASE SEPARATION STRUCTURE

The present invention relates to a method for manufacturing a structural body having a phase separation structure which comprises the processes of: forming a neutralization film including a surface treating agent on a substrate; forming a pattern on the neutralization film by forming, exposing, and...

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Main Authors MIYASHITA KENICHIRO, KUROSAWA TSUYOSHI, MIYAGI KEN, SHIONO DAIJU, MATSUMIYA TASUKU, OHMORI KATSUMI
Format Patent
LanguageEnglish
Korean
Published 28.08.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a method for manufacturing a structural body having a phase separation structure which comprises the processes of: forming a neutralization film including a surface treating agent on a substrate; forming a pattern on the neutralization film by forming, exposing, and developing a photosensitive resin film; forming a layer, on the pattern, including a block copolymer coupled with polymers of multiple types to cover the pattern and the neutralization film; and separating the layer including the proper pattern and the proper block copolymer on the neutralization film.
Bibliography:Application Number: KR20140016360