APPARATUS FOR KEEPING WAFERS

An apparatus for storing a wafer includes: a storage main body having a storage space and an opening; a door capable of opening and closing, and arranged on the opening; a frame installed on the inside of the door, while being fixated to an inner wall of the door; a plurality of elastic ribs protrud...

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Bibliographic Details
Main Authors LIM, KWANG SHIN, KIM, HYEOG KI, CHO, HYUN HO
Format Patent
LanguageEnglish
Korean
Published 24.07.2014
Subjects
ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
BASIC ELECTRIC ELEMENTS
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
STORING
TRANSPORTING
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Summary:An apparatus for storing a wafer includes: a storage main body having a storage space and an opening; a door capable of opening and closing, and arranged on the opening; a frame installed on the inside of the door, while being fixated to an inner wall of the door; a plurality of elastic ribs protruding from the frame; and a first support portion separately arranged from the inner wall of the door by the elastic ribs, while having a contact portion with a plurality of grooves to accommodate border potions of a wafer. The apparatus for storing the wafer includes the first support portion including the elastic ribs to firmly fixate the wafer inside the apparatus for storing the wafer.
Bibliography:Application Number: KR20130004687