COOLING APPARATUS

• Main Authors: YASUDA JUNICHI, FURUYA SHINJI, MASUDA YUKIO, MORIMOTO HIDETOSHI
• Format: Patent
• Language: English; Korean
• Published: 04.07.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Provided is a cooling device capable of efficiently cooling a target object depending on the position of the target object. The cooling device (RU1) of the present invention comprises a refrigerator (2) and a cooling panel (1) cooled by the refrigerator and cools the target object by making the main surface (1a) of the cooling panel closely touch the target object (S). The first position is the position of the cooling panel in which the main surface of the cooling panel is close to or touches the target object. The second position is the position of the cooling panel in which the main surface of the cooling panel is separated from the target object. The cooling panel is cooled by heat transmission as a cooling head (21) of the touches the cooling panel when the cooling panel is in at either the first position or the second position while the cooling panel is installed in a processing chamber to be able to be varied between the first position and the second position.