METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

• Main Authors: FANG YAN, RAMANATHAN SIVAKAMI, DAUGHERTH JOHN, OUTKA DUANE, HUANG TUOCHUAN, MCMILLIN BRIAN, SHIH HONG, SZE FAN CHUENG
• Format: Patent
• Language: English; Korean
• Published: 13.06.2014
• Subjects: ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; GRINDING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; POLISHING; PREVENTION OF FOULING IN GENERAL; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS; SEMICONDUCTOR DEVICES; TRANSPORTING

Provided is a wet cleaning method of aluminum parts having bare aluminum surfaces and anodized aluminum surfaces. The method includes a step of CO_2 dry ice blasting on the surfaces of the aluminum part at pressure of approximately 35-45 psi, a step of masking the aluminum parts to conceal bare aluminum surfaces, a step of soaking the dry ice blasted and masked aluminum parts in deionized water at a temperature of higher than approximately 60°C, a step of scrubbing the aluminum parts with a grinding pad and deionnized water after the completion of soaking the aluminum parts in the deionized water, and a step of repeating soaking and scrubbing in an aforementioned sequence at least three additional times.