DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

A drawing apparatus, that performs drawing on a substrate with multiple charged particle beams based on first image data associated with a first grid, includes a blanker array including a plurality of columns each including a plurality of blankers, a scanning deflector configured to deflect at least...

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Bibliographic Details
Main Author ITO HIROHITO
Format Patent
LanguageEnglish
Korean
Published 10.06.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A drawing apparatus, that performs drawing on a substrate with multiple charged particle beams based on first image data associated with a first grid, includes a blanker array including a plurality of columns each including a plurality of blankers, a scanning deflector configured to deflect at least one of the charged particle beams that has not been blanked by the blanker array to cause the deflected beam to scan the substrate in a scan direction, a drive circuit configured to sequentially drive the blanker array with respect to each of the columns periodically to define a second grid on the substrate that is displaced from the first grid in the scan direction, and a controller configured to generate second image data on the second grid by performing interpolation processing on the first image data related to the first grid and to control the drive circuit based on the second image data.
Bibliography:Application Number: KR20130146917