METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED CONTROL

• Main Authors: DZILNO DMITRY A, LI HONGBIN, MERRY NIR, GREGOR MARIUSCH, RICE MICHAEL R, MINKOVICH ALEX, PORTHOUSE KEITH BRIAN, LANE JOHN W
• Format: Patent
• Language: English; Korean
• Published: 02.05.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES