JIG UNIT FOR FIXING SUBSTRATE AND SUBSTRATE TRANSFERRING APPARATUS INCLUDING THE SAME

• Main Authors: LEE, SUNG JOON, KIM, BYEONG MUN, KIM, GOING SIK, NAM, YOUN CHUL, LIM, SUNG TAEK, LEE, SANG YUP
• Format: Patent
• Language: English; Korean
• Published: 23.04.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES

The present invention relates to a jig unit for fixing a substrate and an apparatus for transferring a substrate including the same. According to an embodiment of the present invention, the proposed jig unit for fixing a substrate includes: a support part which supports the bottom of the substrates...