GAS PURIFYING FACILITY

• Main Authors: CHOO, YEUN WOONG, ITOH TAKAHIRO, SHIRANE TOMOHIRO
• Format: Patent
• Language: English; Korean
• Published: 11.04.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A gas purifying facility comprises a closed blowing source (100), wherein the closed blowing source (100) includes a closed case (101) having an internal space partitioned from the outside; an opened discharge part (105) that draws inert gas from the outside to the internal space via a gas inlet (104); a cooling pipe (103) cooling the internal space of the closed case (101); a vortex blower (102) received in the closed case (101), and supplying the inert gas cooled by the cooling pipe (103); and a gas outlet (107) transferring the inert gas from the vortex blower (102) to the outside via a supply part (106). A pre-filter (201) is disposed in an upstream side of the closed blowing source (100), and a heat exchanger (300) and an HEPA filter (202) are sequentially disposed in a downstream, thereby preventing the adulteration of foreign matters and the intrusion of air and purifying and cooling the inert gas. [Reference numerals] (100) Closed blowing source; (101) Closed case; (101a) Cover; (101b) Receptor; (102) Vortex blower; (103) Cooling pipe; (103a) Coolant supply port; (103b) Coolant discharge port; (104) Gas inlet; (105) Opened discharge part; (106) Supply part; (107) Gas outlet; (AA) Inert gas before cooling; (BB) Cooled inert gas; (CC,DD) Coolant