ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES
Disclosed are methods and systems for adjusting power and frequency based on three or more states. One of the methods includes a step of receiving a pulse signal having a plurality of states. A plurality of wireless RF generator receives a pulse signal. If a pulse signal having a first state is rece...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English Korean |
Published |
24.03.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Disclosed are methods and systems for adjusting power and frequency based on three or more states. One of the methods includes a step of receiving a pulse signal having a plurality of states. A plurality of wireless RF generator receives a pulse signal. If a pulse signal having a first state is received, an RF signal having a preset power level is produced by a first RF generator and a second RF generator. Also, if a pulse signal having a second state is received, an RF signal having a preset power level is produced by the first and second RF generators. In addition, if a pulse signal having a third state is received, an RF signal having a preset power level is produced by the first and second RF generators. [Reference numerals] (106) Matching; (151) Tool UI; (212) Sensor; (AA) TTL signals; (BB) x MHz generator; (CC) y MHz generator; (DD) Plasma |
---|---|
Bibliography: | Application Number: KR20130111451 |