ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES

Disclosed are methods and systems for adjusting power and frequency based on three or more states. One of the methods includes a step of receiving a pulse signal having a plurality of states. A plurality of wireless RF generator receives a pulse signal. If a pulse signal having a first state is rece...

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Bibliographic Details
Main Authors VALCORE JR. JOHN C, LYNDAKER BRADFORD J
Format Patent
LanguageEnglish
Korean
Published 24.03.2014
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Summary:Disclosed are methods and systems for adjusting power and frequency based on three or more states. One of the methods includes a step of receiving a pulse signal having a plurality of states. A plurality of wireless RF generator receives a pulse signal. If a pulse signal having a first state is received, an RF signal having a preset power level is produced by a first RF generator and a second RF generator. Also, if a pulse signal having a second state is received, an RF signal having a preset power level is produced by the first and second RF generators. In addition, if a pulse signal having a third state is received, an RF signal having a preset power level is produced by the first and second RF generators. [Reference numerals] (106) Matching; (151) Tool UI; (212) Sensor; (AA) TTL signals; (BB) x MHz generator; (CC) y MHz generator; (DD) Plasma
Bibliography:Application Number: KR20130111451