APPARATUS FOR SEMICONDUCTOR

Disclosed is a semiconductor apparatus that includes a chamber having a lower body and a chamber lid located in the lower body; an upper electrode for applying plasma power. The upper electrode includes a plate-shaped surface part separated from the chamber lid; and a circular-chain connection parts...

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Bibliographic Details
Main Authors PARK, SANG KI, KIM, HIE CHUL, KIM, JONG SIK, KWAK, JAE CHAN
Format Patent
LanguageEnglish
Korean
Published 12.02.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Disclosed is a semiconductor apparatus that includes a chamber having a lower body and a chamber lid located in the lower body; an upper electrode for applying plasma power. The upper electrode includes a plate-shaped surface part separated from the chamber lid; and a circular-chain connection parts prepared between the chamber lid and the surface part in order to prevent the warpage of the surface part and connected to the chamber lid.
Bibliography:Application Number: KR20140005366