HEATER UNIT AND HEAT TREATMENT APPARATUS

A heat treatment apparatus (10) according to the present invention includes a heat treatment furnace (1), a heat source (21), a light transmitting member (3), and a gas distribution instrument (4). The heat treatment furnace (1) receives an object. The heat source (21) emits infrared rays. The light...

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Bibliographic Details
Main Authors FUJITA TOSHITAKA, TATSUMI TOMOHIKO, NAKANISHI SATORU, FUKUDA YOSHIHITO
Format Patent
LanguageEnglish
Korean
Published 22.01.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A heat treatment apparatus (10) according to the present invention includes a heat treatment furnace (1), a heat source (21), a light transmitting member (3), and a gas distribution instrument (4). The heat treatment furnace (1) receives an object. The heat source (21) emits infrared rays. The light transmitting member (3) is arranged to face the heat source (21) and separates the heat source (21) from atmosphere. The light transmitting member (3) is made of materials to transmit at least part of infrared rays emitted from the heat source (21). The gas distribution instrument (4) distributes cooling gas in a space (300) which is formed between the heat source (21) and the light transmitting member (3). [Reference numerals] (43) Ventilator
Bibliography:Application Number: KR20130054347