JACKET ASSEMBLY FOR MANUFACTURING POLY-SILICON OF APPARATUS FOR DEPOSITING HIGH EFFICIENCY POLY-SILICON

• Main Authors: PARK, KYU DONG, KANG, SEUNG OH, PARK, JONG HOON
• Format: Patent
• Language: English; Korean
• Published: 18.12.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention relates to a jacket assembly for manufacturing poly silicon in which the structure is improved in order to make the separation and combination time of a silicon core rod and a jacket unit faster after a deposition process of the poly silicon. The jacket assembly for manufacturing the poly silicon comprises; multiple silicon core rods which have a pair of silicon rods and are heated by a carried current and deposit the poly silicon according to the reaction of process gas; and the jacket unit which is corresponded to the multiple silicon core rods and forms multiple receiving holes for accepting a pair of silicon rods of the silicon core rod. The multiple silicon core rods and the jacket unit are combined to be able to be separated. The present invention modulates the multiple silicon core rods and the jacket unit for accepting the multiple silicon core rods and reduces a mutual separation time of the multiple silicon core rods and the jacket unit, thereby reducing poly silicon manufacturing process cycle and washing and cleaning times of equipment. [Reference numerals] (500) Cooling water supplying unit