SEMICONDUCTOR AND SOLAR WAFERS AND METHOD FOR PROCESSING SAME

A method for manufacturing a silicon-on-insulator structure including a substrate wafer, an active wafer, and an oxide layer between the substrate wafer and the active wafer. The method includes the steps of heat treating the structure, trapezoid grinding edges of the wafer, and grinding a surface o...

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Bibliographic Details
Main Authors VANDAMME ROLAND, ZHANG GUOQIANG DAVID
Format Patent
LanguageEnglish
Korean
Published 13.12.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A method for manufacturing a silicon-on-insulator structure including a substrate wafer, an active wafer, and an oxide layer between the substrate wafer and the active wafer. The method includes the steps of heat treating the structure, trapezoid grinding edges of the wafer, and grinding a surface of the wafer.
Bibliography:Application Number: KR20137002475