METHOD FOR MANUFACTURING TARGET WITH FLANGE
Provided is a method for manufacturing a target with a flange providing an excellent film and having excellent durability. <Method of solution> A method for manufacturing a target with a flange gives a flange part to the periphery for having the front side of the target mounted toward the insi...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
04.12.2013
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Subjects | |
Online Access | Get full text |
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