METHOD FOR MANUFACTURING TARGET WITH FLANGE

• Main Authors: UI KAZUYA, ENOMOTO KAZUMA, SATOU SHINICHI, FUKANUMA HIROTAKA
• Format: Patent
• Language: English; Korean
• Published: 04.12.2013
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Provided is a method for manufacturing a target with a flange providing an excellent film and having excellent durability. <Method of solution> A method for manufacturing a target with a flange gives a flange part to the periphery for having the front side of the target mounted toward the inside of a device and comprises: a cold spray step (S1, S2) of preparing for a target having predetermined component composition, of spraying metal particles with gas flow, which are heated in the solid state temperature bandwidth, to the back side making a pair with a surface provided as the front side of the target, and of providing a backing plate unit by performing the plastic deformation of the metal particles on the back side while depositing the metal particles; and a machining step (S3) of forming the flange part through a machining process. [Reference numerals] (AA) Manufacturing a target;(BB) END;(S1) Preparing for a target;(S2) Depositing metal particles on a backing plate;(S3) Machining a flange part