GUIDE FOR ALIGNING WAFER

• Main Author: LEE, MOON JIN
• Format: Patent
• Language: English; Korean
• Published: 27.11.2013
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The present invention relates to a wafer aligning guide, and, more specifically, to a wafer aligning guide which is capable not only of reducing replacement costs and hours by configuring an aligning plate to be rotated and turned over for reuse, but of reducing production costs by replacing only the aligning plate without replacing the entire wafer aligning guide, and of promoting productivity by aligning the wafer without stopping the moving wafer. The wafer aligning guide according to the present invention provides a pair of supporters arranged to be mutually faced on both sides of a conveyor; a cover detachable to the supporters by being located at the upper side of the supporters; and a pair of aligning plates detachably arranged in between the supporters and the cover, and aligning the wafer by being contacted with both sides of the wafer transferred by the conveyor.