APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE

An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The o...

Full description

Saved in:
Bibliographic Details
Main Authors SMITH DANIEL GENE, PHARAND MICHEL, STAMPER BRIAN L, COOPER ALEXANDER, WILLIAMSON DAVID MICHAEL, GOODWIN ERIC PETER, ROBERTSON ALEC
Format Patent
LanguageEnglish
Korean
Published 27.09.2013
Subjects
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
Online AccessGet full text

Cover

More Information
Summary:An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.
Bibliography:Application Number: KR20137013385