WAFER TRANSFER POD FOR REDUCING WAFER PARTICULATE CONTAMINATION

PURPOSE: A wafer transporting pod which reduces particle contamination of the wafer is provided to prevent other wafers from being cross-contamination by preventing pollutants and particles from falling down on the wafer. CONSTITUTION: A main body comprises an upper panel (12), a floor panel (14), a...

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Bibliographic Details
Main Authors SUEN SHU HUEI, ZHANG YING, LIU YU CHENG, CHENG TIEN CHIH, CHIOU JIAN HUAH
Format Patent
LanguageEnglish
Korean
Published 30.07.2013
Subjects
ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
BASIC ELECTRIC ELEMENTS
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
STORING
TRANSPORTING
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Summary:PURPOSE: A wafer transporting pod which reduces particle contamination of the wafer is provided to prevent other wafers from being cross-contamination by preventing pollutants and particles from falling down on the wafer. CONSTITUTION: A main body comprises an upper panel (12), a floor panel (14), a back panel, a front panel, and two side panels (18). A front panel provides an entrance and an exit of the semiconductor wafer to inside and outside of the carrying wafer pod. Two side panels accept a semiconductor wafer. Two side panels have multiple individual sealed partition walls inside the main body. Any two of the sealed partition walls seal the wafer inside to prevent the contamination of the wafer. Multiple sealed partition walls respectively decide the location of each wafer.
Bibliography:Application Number: KR20120046982