IMPROVED DEVICE AND METHOD OF SEPARATING SUBSTRATE, AND COATING APPARATUS HAVING THE SAME

PURPOSE: An improved device and a method for separating a substrate, and a coating apparatus having the same are provided to prevent breakage by facilitating the separation of a substrate. CONSTITUTION: Holes pass through an adsorption surface on a suction table. Pinholes pass through the adsorption...

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Bibliographic Details
Main Author NA, SANG JIN
Format Patent
LanguageEnglish
Korean
Published 05.07.2013
Subjects
APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SEMICONDUCTOR DEVICES
SPRAYING OR ATOMISING IN GENERAL
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
TRANSPORTING
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Summary:PURPOSE: An improved device and a method for separating a substrate, and a coating apparatus having the same are provided to prevent breakage by facilitating the separation of a substrate. CONSTITUTION: Holes pass through an adsorption surface on a suction table. Pinholes pass through the adsorption surface. Lift pins (271) move up and down in the pinholes. The lift pins are mounted on an up-down frame (274). An air supply device (283) supplies air to the holes.
Bibliography:Application Number: KR20110143989