METHOD FOR CRYSTALLIZING SILICON THIN FILM AND METHOD FOR MANUFACTURING SILICON TFT DEVICE

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Bibliographic Details
Main Authors KAWASHIMA TAKAHIRO, ODA TOMOHIKO
Format Patent
LanguageEnglish
Korean
Published 07.03.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: KR20117021063