APPARATUS FOR TREATING SURFACE OF MINUTE PARTICLES
PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adj...
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| Main Authors | , , , |
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| Format | Patent |
| Language | English Korean |
| Published |
20.02.2013
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| Subjects | |
| Online Access | Get full text |
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| Abstract | PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adjustment part(120) controls the slope of the surface process pipe. A fine particle supplying part(130) supplies the fine particles to the surface process tube. A control unit(140) transmits the information of the fine particles to the slope adjustment part. |
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| AbstractList | PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adjustment part(120) controls the slope of the surface process pipe. A fine particle supplying part(130) supplies the fine particles to the surface process tube. A control unit(140) transmits the information of the fine particles to the slope adjustment part. |
| Author | KIM, JEONG HOON KANG, JUNG GOO YUN, CHONG HYO KANG, SAN WOONG |
| Author_xml | – fullname: KANG, SAN WOONG – fullname: KIM, JEONG HOON – fullname: KANG, JUNG GOO – fullname: YUN, CHONG HYO |
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| Notes | Application Number: KR20110079495 |
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| RelatedCompanies | SPS CO., LTD |
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| Snippet | PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | APPARATUS FOR TREATING SURFACE OF MINUTE PARTICLES |
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