APPARATUS FOR TREATING SURFACE OF MINUTE PARTICLES

PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adj...

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Bibliographic Details
Main Authors KANG, SAN WOONG, KIM, JEONG HOON, KANG, JUNG GOO, YUN, CHONG HYO
Format Patent
LanguageEnglish
Korean
Published 20.02.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adjustment part(120) controls the slope of the surface process pipe. A fine particle supplying part(130) supplies the fine particles to the surface process tube. A control unit(140) transmits the information of the fine particles to the slope adjustment part.
Bibliography:Application Number: KR20110079495