METHOD FOR MANUFACTURING 3D STRUCTURED NON-VOLATILE MEMORY DEVICE
PURPOSE: A method for manufacturing a nonvolatile memory device of a 3D structure is provided to increase a cell current by forming a first protection layer and a second protection layer with carbon on a pipe gate. CONSTITUTION: A first protection layer(22) is formed on a pipe gate(20). A second pro...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English Korean |
Published |
14.02.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!