HEAT TREATMENT APPARATUS

PURPOSE: A heat treatment device is provided to prevent the penetration of dust into a transferring path and to improve the degree of cleanness in a transferring path. CONSTITUTION: A heat treatment device(10) comprises outer wall members(11,12) and dust-preventing members(31,32,34). The outer wall...

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Bibliographic Details
Main Authors KAJITA HIROSHI, URANISHI YOSHIKAZU, MORIMOTO IWAO
Format Patent
LanguageEnglish
Korean
Published 05.02.2013
Subjects
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Summary:PURPOSE: A heat treatment device is provided to prevent the penetration of dust into a transferring path and to improve the degree of cleanness in a transferring path. CONSTITUTION: A heat treatment device(10) comprises outer wall members(11,12) and dust-preventing members(31,32,34). The outer wall member surrounds all four sides of the transferring path of an object. The dust-preventing members are arranged along the transferring path. A flexible heat-resistant sheet is arranged in the contact part of the dust-preventing members. The heat-resistant sheet has a hollow inside. The formation of a gap between the dust-preventing members is prevented and the penetration of dust into the transferring path is prevented.
Bibliography:Application Number: KR20120156386