METHOD AND DEVICE FOR REFILLING AN EVAPORATOR CHAMBER

• Main Authors: JAHNKE ANDREAS, BOGER RAIMUND, GOETZE THOMAS
• Format: Patent
• Language: English; Korean
• Published: 21.01.2013
• Subjects: BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINTS OR FITTINGS FOR PIPES; LIGHTING; MEANS FOR THERMAL INSULATION IN GENERAL; MECHANICAL ENGINEERING; METALLURGY; PIPE-LINE SYSTEMS; PIPE-LINES; PIPES; STORING OF DISTRIBUTING GASES OR LIQUIDS; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; THERMAL INSULATION IN GENERAL; WEAPONS

The method for refilling an evaporator chamber (8), comprises transferring a material (1) containing selenium into a siphon within a heated vacuum chamber via a feeder (6) and a heated vacuum slide (2), heating the material in the siphon up to liquefaction, and transferring the material into a tank within the evaporator chamber via a funnel connected with an exit of the siphon. The heating of the heated vacuum slide takes place by a cooled connection piece (12) and/or a heated connection piece mounted on it. The heated vacuum slide is heated at 160-200[deg] C. The siphon is heated at 200-250[deg] C. The method for refilling an evaporator chamber (8), comprises transferring a material (1) containing selenium into a siphon within a heated vacuum chamber via a feeder (6) and a heated vacuum slide (2), heating the material in the siphon up to liquefaction, and transferring the material into a tank within the evaporator chamber via a funnel connected with an exit of the siphon. The heating of the heated vacuum slide takes place by a cooled connection piece (12) and/or a heated connection piece mounted on it. The heated vacuum slide is heated at 160-200[deg] C. The siphon is heated at 200-250[deg] C. The vacuum chamber is evacuated at a pressure of p 1of 10 3>mbar and the evaporation chamber is evacuated at a pressure of p 2of 10 -> 2>to 10 -> 7>mbar and is heated at a temperature of 230-270[deg] C, where p 1is greater than p 2. An independent claim is included for a device for discontinuously refilling an evaporator chamber.