IMPRINT APPARATUS AND METHOD FOR IMPRINTING USING THE SAME

• Main Authors: KIM, JUNG KWON, KANG, JI EUN, YANG, JAE YOUNG, KIM, JUN TAK, KIM, BYEONG GUK
• Format: Patent
• Language: English; Korean
• Published: 09.01.2013
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; PERFORMING OPERATIONS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

PURPOSE: An imprinting apparatus and an imprinting method using the same are provided to apply even pressure to the whole surface in an imprinting process as particles on a substrate-resin-stamp laminate are removed by a static electricity generating member before a film is closely attached to the substrate-resin-stamp laminate. CONSTITUTION: An imprinting apparatus comprises a chamber unit(10), a stage(20), a static electricity generating member(30), and a film(50). The stage is installed in a chamber, and a substrate-resin-stamp laminate(1) is loaded on the stage. The static electricity generating member is movably installed on the stage, and electrically connected to external power. The static electricity generating member removes particles on the substrate-resin-stamp laminate by adsorbing the particles. The film covers the substrate-resin-stamp laminate, and presses the substrate-resin-stamp laminate.