APPARATUS FOR MANUFACTURING SOLAR CELL SUBSTRATE AND METHOD FOR CONTROLLING THE SAME

• Main Authors: KIM, DO YEON, LEE, MIN WOOK, PARK, JUNG JAE, YOON SUK GOO
• Format: Patent
• Language: English; Korean
• Published: 02.01.2013
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

PURPOSE: An apparatus for manufacturing a solar cell substrate and a method for controlling the same are provided to form an anti-reflection groove through a physical method and to smoothly perform a process for forming a large size. CONSTITUTION: A substrate stage(12) is mounted in a chamber. The substrate stage includes a solar cell board. A powder supply unit(20) includes a nozzle and a powder feed port. A powder aerosol is discharged from the nozzle to the substrate stage. The powder feed port supplies the powder aerosol to the nozzle. [Reference numerals] (50) Control unit; (60) Storage unit; (70) Calculation unit