APPARATUS FOR ALIGNING WAFER

PURPOSE: A wafer aligning apparatus is provided to improve quality by preventing a wafer from being damaged in a water aligning process. CONSTITUTION: A transfer unit(100) successively transfers a wafer(30) from a cassette magazine(20) one by one. An aligning unit(200) is symmetrically arranged on b...

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Bibliographic Details
Main Author YOON, DAE SIK
Format Patent
LanguageEnglish
Korean
Published 27.12.2012
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PURPOSE: A wafer aligning apparatus is provided to improve quality by preventing a wafer from being damaged in a water aligning process. CONSTITUTION: A transfer unit(100) successively transfers a wafer(30) from a cassette magazine(20) one by one. An aligning unit(200) is symmetrically arranged on both sides of the transfer unit and includes a driving unit(210), a receiving unit(220), and a rail part(230). A driving unit is formed with a cylinder structure using hydraulic or air pressure. A rolling member(224) is received in the receiving unit to align the wafer.
Bibliography:Application Number: KR20110058543