ELECTROSTATIC CHUCK

PURPOSE: An electrostatic chuck is provided to have stable adsorption and support capacity by dividing a dielectric layer into a trench part and an embossing part. CONSTITUTION: A conductive layer is connected to a power supply unit. A dielectric layer(100) is divided into an embossing part(E) and a...

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Bibliographic Details
Main Author DOH, SUNG WON
Format Patent
LanguageEnglish
Korean
Published 24.12.2012
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Summary:PURPOSE: An electrostatic chuck is provided to have stable adsorption and support capacity by dividing a dielectric layer into a trench part and an embossing part. CONSTITUTION: A conductive layer is connected to a power supply unit. A dielectric layer(100) is divided into an embossing part(E) and a trench part(T). The trench part is arranged in an edge portion of the dielectric layer. The trench part comprises one or more channels(121). The embossing part is formed at the inner portion of the dielectric layer. The embossing part has a plurality of protrusions(122).
Bibliography:Application Number: KR20110057210