OPTICAL MESUREMENT APPARATUS

• Main Authors: JANG, JI EON, SHIN, MYONG SEOP
• Format: Patent
• Language: English; Korean
• Published: 19.10.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PURPOSE: An optical measuring device is provided to irradiate first lights for measuring the photoluminescence of a measurement specimen and second lights for measuring a reflective rate and thickness at the same time, thereby measuring the thickness and reflective rate of the photoluminescence with respect to the measurement specimen. CONSTITUTION: An optical measuring device comprises a supporter(1), a first irradiator(2), a second irradiator(3), and a detector(5). A measurement specimen is fixed to the supporter. The first irradiator irradiates first lights to the measurement specimen. The second irradiator irradiates second lights which wavelength is different from the wavelength of the first lights to the measurement specimen. The detector receives reflected lights of the first and second lights, thereby obtaining the information of the measurement specimen.