OPTICAL MESUREMENT APPARATUS

PURPOSE: An optical measuring device is provided to irradiate first lights for measuring the photoluminescence of a measurement specimen and second lights for measuring a reflective rate and thickness at the same time, thereby measuring the thickness and reflective rate of the photoluminescence with...

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Bibliographic Details
Main Authors JANG, JI EON, SHIN, MYONG SEOP
Format Patent
LanguageEnglish
Korean
Published 19.10.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PURPOSE: An optical measuring device is provided to irradiate first lights for measuring the photoluminescence of a measurement specimen and second lights for measuring a reflective rate and thickness at the same time, thereby measuring the thickness and reflective rate of the photoluminescence with respect to the measurement specimen. CONSTITUTION: An optical measuring device comprises a supporter(1), a first irradiator(2), a second irradiator(3), and a detector(5). A measurement specimen is fixed to the supporter. The first irradiator irradiates first lights to the measurement specimen. The second irradiator irradiates second lights which wavelength is different from the wavelength of the first lights to the measurement specimen. The detector receives reflected lights of the first and second lights, thereby obtaining the information of the measurement specimen.
Bibliography:Application Number: KR20110033453