MULTICHANNEL MONOLITHIC QUARTZ CRYSTAL MICROBALANCE WITH DITCH STOPPER

PURPOSE: A multi-channel quartz crystal micro-balance having a partitioning groove is provided to reduce interferences that vibration generated by each electrode interferes to other adjacent electrodes. CONSTITUTION: A multi-channel quartz crystal micro-balance(100) having a partitioning groove(40)...

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Bibliographic Details
Main Authors LEE, YONG HOON, YIM, HONG JAE, LIM, SI HYUNG, KIM, KYU HAK
Format Patent
LanguageEnglish
Korean
Published 10.10.2012
Subjects
MEASURING
PHYSICS
TESTING
WEIGHING
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Summary:PURPOSE: A multi-channel quartz crystal micro-balance having a partitioning groove is provided to reduce interferences that vibration generated by each electrode interferes to other adjacent electrodes. CONSTITUTION: A multi-channel quartz crystal micro-balance(100) having a partitioning groove(40) comprises a crystal substrate(10) and a plurality of electrodes. The crystal substrate consists of a quartz crystal. The electrodes consists of a first electrode(20) and a second electrode. The first electrode is arranged in a front surface of the quartz crystal. The second electrode is arranged in a rear surface of the crystal substrate to be faced to the first electrode. The crystal substrate is divided into a plurality of sensing areas by the partitioning groove concavely formed on a surface of the crystal substrate. Each electrode is respectively arranged in the plurality of sensing areas divided by the partitioning groove.
Bibliography:Application Number: KR20110029879