EDGE GRIP TYPE PRE-ALIGNER

PURPOSE: An edge grip type pre-aligner is provided to reduce an error incidence rate of a wafer by preventing the wafer from cracking and pitching due to the edge grip. CONSTITUTION: A base(2) is a basic structure of a pre-aligner. A clamp lever(5) is arranged to rotate a wafer(3). A central shaft i...

Full description

Saved in:
Bibliographic Details
Main Authors KIM, CHOUNG HO, TAKAO NAKAMORI
Format Patent
LanguageEnglish
Korean
Published 26.09.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: An edge grip type pre-aligner is provided to reduce an error incidence rate of a wafer by preventing the wafer from cracking and pitching due to the edge grip. CONSTITUTION: A base(2) is a basic structure of a pre-aligner. A clamp lever(5) is arranged to rotate a wafer(3). A central shaft is connected to a rotation central shaft driven by a motor. The clamp lever includes three clamp arms. The clamp arm is extended to the radial direction by being connected to the central shaft. The clamping structure is formed on a front end of each clamp arm to clamp the wafer. A detector(6) is formed on one side of the base to detect the position of a notch of the wafer.
Bibliography:Application Number: KR20110023249