LIFT PIN MODULE AND APPARATUS FOR MANUFACTURING OF FPD INCLUDING THE SAME

• Main Author: KIM, EUN SUK
• Format: Patent
• Language: English; Korean
• Published: 12.09.2012
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: A lift pin module and a flat display element manufacture device including the same are provided to minimize defects in substrate processing by equally arranging the height of a plurality of lift pins. CONSTITUTION: A pin plate(110) has a plurality of combining apertures(112). A female screw unit(114) is formed in the inner circumference of the plurality of combining apertures. A pin height control unit(120) is combined with the plurality of combining apertures of the pin plate. A female screw unit(124) is formed in the inner circumference of a seating groove of the pin height control unit. A penetration hole(132) is formed in a pin separation holder(130). The diameter of the penetration hole is bigger than the diameter of a lift pin(60).