SUBSTRATE SUPPORTING PIN AND LOAD LOCK CHAMBER WITH THE SAME

• Main Author: KIM, EUN SUK
• Format: Patent
• Language: English; Korean
• Published: 12.09.2012
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: A substrate supporting pin and a load lock chamber including the same are provided to effectively reduce the damage of a substrate due to static electricity. CONSTITUTION: A plurality of substrate supporting pins(10) is correctly parked on the bottom of a chamber body. The plurality of substrate supporting pins supports a substrate at the bottom side. The plurality of substrate supporting pins comprises a plurality of point contact substrate supporting pins(20) and a plurality of face contact substrate supporting pins(30). The plurality of point contact substrate supporting pins comprises a pin body and a pin head. The plurality of face contact substrate supporting pins comprises a pin body and a pin head.